Category：Rapid Thermal Processing
RTP-DTS-8 automatic double-chamber Rapid Thermal Processing is a fully automatic vertical rapid annealing system in protective atmosphere, which uses infrared visible light to heat monolithic Wafer or samples with short process time and high temperature control precision. It is suitable for 6-inch and 8-inch Rapid Thermal Processing process.
RTP-DTS-8 is a fully automatic vertical Rapid Thermal Processing system under a protective atmosphere, which heats single wafers or samples with infrared visible light. The process time is short, the temperature control accuracy is high, and it is suitable for theRapid Thermal Processing of 6-inch and 8-inch wafers. Compared to traditional diffusion furnace annealing systems and other RTP systems, its unique cavity design, advanced temperature control technology, and unique RL900 software control system ensure excellent thermal uniformity.
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