Category：Rapid Thermal Processing
RTP-Table-6 desktop Rapid Thermal Processing is a desktop rapid annealing system in protective atmosphere, which is heated by infrared halogen lamp to accurately control the temperature, ensuring good reproducibility and temperature uniformity, suitable for 6-inch rapid annealing process.
RTP-Table-6 is a table-top 6-inch wafer fast Rapid Thermal Processing, using upper and lower layers of infrared halogen lamp as heat source to heat the internal quartz cavity for thermal insulation, and the cavity shell is water-cooled aluminum alloy, so that the product is heated evenly and the surface temperature is low.
RTP-Table-6 is controlled by PID, the system can quickly adjust the output power of infrared halogen lamp, and the temperature control is more accurate.
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