As a core component of modern electronic equipment, the quality and reliability of semiconductor chips are crucial to the entire electronics industry. Die bonding is the process of assembling chips onto a substrate or frame. The presence of organic contamination and oxide film on the surface of the substrate or frame, as well as the wettability of silicon crystals on the back of the chip, can affect the bonding effect. Traditional cleaning methods are no longer sufficient to meet the requirements for chip quality. The use of microwave PLASMA plasma cleaning machine to treat the surface of chips can effectively clean and improve the surface wettability, thereby enhancing the bonding effect of chips.

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Microwave refers to electromagnetic waves with frequencies between 300MHz and 300GHz, with wavelengths of about 1mm-1m. It has the characteristics of high maneuverability and wide operating frequency. A microwave generator is used with a 1.25KW power supply to generate microwave energy, which is fed into the plasma chamber and forms an plasmon in a low-pressure environment.

The microwave plasma cleaning machine adopts advanced plasma technology, which can generate powerful plasma in high-temperature and high-pressure environments. This type of plasma can efficiently remove organic and inorganic pollutants on the surface of chips, completely eliminating impurities on the chip surface. Compared to traditional chemical cleaning methods, microwave plasma cleaning machines do not require the use of a large amount of harmful chemicals, making them more environmentally friendly and safe.

The microwave plasma cleaning machine has a high level of automation and intelligence. Through advanced sensors and control systems, the cleaning process can be monitored and adjusted in real time, ensuring that each chip can receive precise cleaning. Moreover, the microwave plasma cleaning machine can automatically adjust the cleaning parameters according to the different materials and structures of the chip, maximizing the cleaning effect and chip reliability.

The microwave plasma cleaning machine also has the characteristics of high efficiency and energy conservation. Traditional cleaning methods often require a large amount of water and energy consumption, while microwave plasma cleaning machines can complete the cleaning process in a short time, greatly saving resources and costs. Meanwhile, the microwave plasma cleaning machine can also recycle the cleaning solution, reducing the discharge of waste liquid and making it more environmentally friendly.