Microwave plasma cleaning machine, SPV-100MW, is a low-pressure microwave plasma cleaning system used for surface pretreatment before processes such as surface mounting, soldering, and packaging. Free moving electrons generate plasma and enter the material box where the cavity is located for process cleaning. By applying a microwave with a frequency of 2.45GHz to the window on the wall of the vacuum chamber, a large amount of sustained plasma can be generated. The chamber is suitable for boxes of different sizes.