Category：Plasma Glue Remover
The processing temperature is low and can maintain the plasma under high pressure
ST-3300 is a batch crystal cylindrical microwave debonding equipment that uses photoresist removal - high dose ion implantation, dry etching, wet chemical treatment, removal of sacrificial layer, removal of SU-8 photoresist, etc. Free moving electrons generate Plasma and enter the photoresist on the wafer surface inside the quartz boat where the cavity is located for process cleaning. A large amount of sustained plasma can be generated by applying a microwave with a frequency of 2.45 GHz to the wall of the vacuum chamber. The cavity is suitable for 4-8 inch crystal round quartz boats.
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