Semiconductor Rapid annealing Furnace (RTP) is a special heating equipment, which can quickly heat semiconductor materials to high temperature in a short time and achieve a very high temperature gradient by rapid cooling. 

In the rapid annealing furnace, the selection of appropriate carrier material is very important for the annealing effect and product quality. 

There are many choices of wafer carrier materials for rapid annealing furnace, including silicon carbide, aluminum nitride and graphite silicon carbide. 

These materials have their own characteristics and are suitable for different application scenes.

1. Silicon carbide carrier plate is a commonly used material, which is made of silicon carbide material and is suitable for wafer carrying containers in the process of semiconductor manufacturing. 

Silicon carbide carrier disk has the characteristics of high temperature resistance, corrosion resistance and good thermal stability, and can maintain good performance stability in high temperature environment. 

In addition, the silicon carbide carrier plate has high temperature control accuracy, which can ensure that the wafer is uniformly heated during annealing and reduce the occurrence of disk explosion. 

However, the service life of the silicon carbide carrier disk will be affected by the maintenance and use environment, and its life will be shortened if it is not maintained or exposed to chemical corrosion for a long time.

* Silicon carbide carrier plate

2. Aluminum nitride carrier plate is another common material, the heating speed of aluminum nitride carrier plate is very fast, it can reach high temperature in a short time, at the same time, the heat distribution is uniform, and the heat transfer effect is good, which can greatly shorten the heating time and improve the work efficiency.

* Silicon carbide carrier plate

3. In addition, there is a kind of graphite disk material. Graphite has good thermal conductivity and high temperature resistance, so it is suitable for high temperature rapid annealing furnace. The graphite plate material can conduct heat quickly, make the metal material heated uniformly and improve the annealing effect.

* fully automatic double-chamber rapid annealing furnace

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