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Classification and advantages of RTP Rapid annealing Furnace

Rapid annealing furnace is an equipment for heat treatment of all kinds of materials, but different materials use different rapid annealing furnaces. 

The classification, application and advantages of rapid annealing furnace are introduced below. 

1. Well-type vacuum rapid annealing furnace: 

Main applications: annealing of round wire and steel strip. 

Structural composition: including furnace body, furnace lining, vacuum pump, circulating fan and electrical control system. 

Advantages: vacuum heating annealing, no nitriding and no decarburization, so that the workpiece remains bright after annealing. 

2.Aluminum alloy rapid annealing furnace: 

Main applications: heat treatment and soaking annealing of aluminum alloy and aluminum plate. 

Structural composition: including trolley furnace body, circulation system, diversion equipment, heating element, charging trolley, furnace door lifting mechanism and electrical control system. 

Advantages: it has efficient heating and annealing properties, which helps to improve the properties of aluminum alloy materials. 

3.Semiconductor rapid annealing furnace:

Working principle: semiconductor rapid annealing furnace (RTP) is a special heating equipment, which can quickly heat semiconductor materials to high temperature in a short time and achieve a very high temperature gradient by rapid cooling. 

Main applications: back-end process of CMOS devices, preparation of GaN films, crystal growth of SiC materials and annealing after polishing, etc. 

Advantages: the rapid heating process and short duration of RTP rapid annealing furnace can repair lattice defects, activate impurities and optimize the electrical conductivity after ion implantation.

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4.Atmosphere annealing furnace: 

Working principle: by injecting protective gas into the furnace to reduce the content of oxygen and water vapor in the furnace air to achieve the effect of dressing and enhancing material properties. 

Common types: box atmosphere annealing furnace, push rod atmosphere annealing furnace, mesh belt atmosphere annealing furnace and so on. 

Advantages: widely used in the annealing treatment of castings, forgings and weldments, which can effectively improve material properties. 

5.Vacuum annealing furnace: 

Working principle: vacuum pump is used to empty the air and water vapor in the furnace, so that the metal material does not have chemical reaction with oxygen and nitrogen in the air, so as to realize oxygen-free annealing. 

Common types: multi-purpose vacuum annealing furnace, single crystal vacuum annealing furnace, optical film vacuum annealing furnace and so on. 

Advantages: widely used in electronic components, aerospace, medical and constraint materials and other industries, can effectively avoid the oxidation and nitriding of materials in the annealing process.



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